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纳米计量的溯源与传递 被引量：3

Traceable Transfer for Nanometrology
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摘要 介绍了纳米计量溯源到国际基本单位制(SI)的传递过程。回顾了国内外计量型扫描探针显微镜(Scanning Probe Microscope,SPM)的工作原理及其溯源性。论述了目前主要纳米计量参数、溯源用标准样本的研究概况。 Transfer chain of nanometrology traceability to the International System of Units （SI） is introduced. And the principle and the measurement traceability of metrological scanning probe microscope in China and abroad is reviewed. Then,the research overview of the nanometrology parameters and traceable standard samples is described.
作者 王岳宇
机构地区 北京东方计量测试研究所
出处 《宇航计测技术》 CSCD 2010年第1期75-79,共5页 Journal of Astronautic Metrology and Measurement
关键词 纳米 计量 溯源 +扫描探针显微镜 Nanometer Metrology Trace SPM
分类号 TB92 [机械工程—测试计量技术及仪器]
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参考文献11

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  • 5赵克功,H.J.Buechner.无阿贝误差计量型原子力显微镜[J].计量学报,2002,23(2):87-89. 被引量：8
  • 6高思田,叶孝佑,邵宏伟,杜华,金其海,杨自本,陈允昌.用于纳米级三维表面形貌及微小尺寸测量的原子力显微镜[J].制造技术与机床,2004(8):34-39. 被引量：7
  • 7戴高良,KOENDERS Ludger,DANZEBRINK Ulrich,WILKENING Günter,周健雄,陈振宇.采用计量型扫描力显微镜校准微纳米标准样板[J].纳米技术与精密工程,2006,4(1):10-19. 被引量：8
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二级参考文献29

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共引文献47

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宇航计测技术
2010年 第1期

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