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微波MEMS滤波器的研究进展 被引量：6

Research Progress of RF MEMS Filters
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摘要 文章介绍了应用于射频微波系统的MEMS滤波器,结合最近几年国内外的MEMS滤波器研究成果,从MEMS滤波器的设计方法和滤波器性能等方面阐述了各种MEMS滤波器的技术发展状态。 In this paper, MEMS microwave filters are classified and described comprehensively. According to recent development of MEMS microwave filters, the state-of-the-art of microwave MEMS filters is presented from the view of design and performance. The significance of MEMS filter technology is proposed.
作者 李文明 李骁骅 杨月寒 刘海文 杨谟华 于奇
机构地区 电子科技大学电子薄膜与集成器件国家重点实验室 中国科学院光电技术研究所微细加工光学技术国家重点实验室
出处 《空间电子技术》 2010年第1期90-95,共6页 Space Electronic Technology
关键词 微机电系统 微波滤波器 单片微波集成电路 MEMS Microwave filter MMIC
分类号 TN925 [电子电信—通信与信息系统]
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参考文献23

  • 1Tsai C S, Qiu G, Gao H, et al. Tunable wideband microwave band-stop and band-pass filters using YIG/GGG- GaAs layer structures [ J ]. IEEE Trans. Magn. , 2005, 41(10) : 3568-3570.
  • 2Oceral A, Farinellil P, Mezzanottel P, et al. A novel MEMS-tunable hairpin line filter on silicon substrate [ C ] . 36th. European Microwave Conference, Manchester UK, 2006.9 : 803 - 806.
  • 3Pillans B,Malczewski A, Allison R, et al. 6 - 15 GHz RF MEMS tunable filters [ C ]. IEEE MTT-S Int. Microwave Symp. Dig. , Long Beach, United States, 2005 : 919 -922.
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二级参考文献36

  • 1唐孝明,唐高弟,张海.薄膜体声波谐振器技术[J].微纳电子技术,2005,42(8):380-383. 被引量：2
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共引文献7

同被引文献34

引证文献6

二级引证文献17

空间电子技术
2010年 第1期

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