摘要
论述一种用透射谱包络线法计算非晶薄膜的折射率、消光系数和光学带隙的方法。通过正交实验确定除压强之外的工艺参数,研究压强的改变对薄膜主要光学常数的影响,运用最小二乘法、内插值法在matlab编程基础上,拟合出光学常数曲线,借由观察曲线的特点,分析在低工作气压下,气压的改变对光学常数的影响。
This paper presents a method that calculates refractive index,extinction coefficient and optical band-gap of amorphous thin-film with transmission spectral envelope. The process parameters except the pressure are determined by orthogonal experiments,and the impact of main optical constants of thin films caused by the changes of the pressure is studied. Using the least square method and interpolation on basis of programming in matlab,a curve of optical constants is fitted,which is used to analyze the influence on the optical constants at low variable pressure.
出处
《长春理工大学学报（自然科学版）》
2010年第1期51-53,7,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
国防科工委973项目
关键词
光学常数
包络线法
折射率
消光系数
光学带隙
optical constants
envelope method
refractive index
extinction coefficient
optical band-gap
