期刊文献+

分步重复投影光刻机同轴对准系统 被引量:8

Coaxial Alignment System for Wafer Stepper
下载PDF
导出
摘要 对投影光刻机同轴对准系统进行了理论分析,阐述了系统的成象机理和工作过程,并在整机上检测了同轴对准系统的重复精度。该系统在掩模和硅片上均刻有对准光栅标记,经光栅衍射后形成干涉信号,使对准信噪比大大提高,并实现了掩模和硅片之间的直接对准,同时利用光弹性调制器组件对光学信号进行了光学调制,由电路实施解调,提供了一种保持高信噪比,又使弱信号探测不降低精度的对准方案。该系统可适用于各种硅片衬底,工艺适应能力强,稳定性能好,重复对准精度可达±0.1μm(3σ)。 The coaxial alignment system of the wafer stepper is analyzed in theory.The imaging mechanism and the operating process are described,the repeated accuracy of the coaxial alignment system is tested on the whole machine.The alignment grating marks are etched on mask and wafer,interference signal is formed through grating diffraction,thus the alignment signalnoiseratio is highly raised.The direct alignment between mask and wafer is realized.Optical signal is modulated by means of optical elastic modulator module,then it is demodulated by circuits,thus an alignment method which not only maintains a high signalnoiseratio but also not reduce detection accuracy for the weak signal is provided.The system is suitable for various wafer substrate.Its technological adaptability is strong and stability is good,its repeated alignment accuracy is as high as ±0.1μm(3σ).
作者 郭京平
出处 《光电工程》 CAS CSCD 1998年第3期1-6,共6页 Opto-Electronic Engineering
基金 国家"八五"科技攻关项目
关键词 分步重复光刻机 掩模对准系统 对准精度 光刻 Stepandrepeat photoetching machines,Mask aligners,Alignment accuracy.Classification number TN305
  • 相关文献

参考文献1

  • 1丁天怀,半导体设备,1982年,3期,1页

同被引文献21

  • 1吴耀才,陈旭南.0.8—1微米分步重复投影光刻机研制[J].LSI制造与测试,1996,17(6):7-11. 被引量:1
  • 2David H Ziger,Peroux Linear Alignment Correction algorithm for Deep Submicron Lithography[ J ]. SPIE , 2002,468,1057-1069.
  • 3David R.Beaulieu. Dark Field Technology a practical approach to local alignment[J]. SPIE, 1987, 772: 142.
  • 4Kazuya Ota, Nobutaka Magome,Kenji Nishi. New Alignment Sensors for Stepper[J]. SPIE ,1991, 1463: 304-314.
  • 5Yamashita K,Nomura N, Takemoto T. holographic Nanometer Alignment for a Wafer Stepper[C]. 18th Int. Conf. On Solid State Devices and Materials. Tokyo, 1986, 25-28.
  • 6K.Yamashita, N.Nomura, K. Kubro,Y. Yamada. Heterodyne Holographic Nanometer Alignment for a Half -Micron Wafer Stepper[J]. SPIE, 1990, 1264: 219-226.
  • 7S.wittekoek. Phase grating as wafer stepper alignment marks for all process lasers[J]. SPIE, 1986, 633: 60.
  • 8Hughlet RE,Coop K A. A Video based alignment system for X-ray lithography[D]. PIE 1465. 1991: 100-110.
  • 9Tojo T,Higashita T, Tabata M. New TTL Alignment Method for Optical Lithographic System[J]. Int .J.Japan Soc.Proc.Eng. 1992,26(2): 144-151.
  • 10Akiyyoshi Suzuki. Duble Telecentic. Wafer Stepper Using Laser Scanning[J]. SPIE, 1985, 538: 2.

引证文献8

二级引证文献24

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部