摘要
采用部分相干成象理论对二元光栅照明进行了较为详细的研究。分析了二元光栅照明对分辨力、焦深、照明能量和照明均匀性的影响，并通过实验研究验证了二元光栅对分辨力和焦深有较大程度的提高。
Binary grating illumination was investigated in detail by using partial coherent imaging theory.The influence of the binary grating illumination upon resolution,focal depth,illumination energy and uniformity were analyzed.The larger improvement of the resolution and focal depth realized by binary grating is demonstrated through experimental investigation.At the same time the loss of energy is not large.
出处
《光电工程》
CAS
CSCD
1998年第6期111-115,共5页
Opto-Electronic Engineering
关键词
分辨率
焦深
二元光栅
照明
光刻
Resolution,Focal depth,Binary Grating,Illumination,Photolithography.
