摘要
金刚石薄膜涂层是最硬的耐磨涂层,有着广泛的应用前景。本文叙述了涂层技术的发展,介绍了涂复金刚石薄膜涂层的气相合成方法:离子束蒸镀法、间歇加热CVD法、热丝CVD法和电弧放电CVD法。
Diamond film is one of the most wear resistance and has good prospects. The paper presents its development and following technological processes; vapourphase synthesis, ion beam evaporation, CAD by heating intermittenly, CAD by thermal wire and arc-discharging.
出处
《润滑与密封》
CAS
CSCD
北大核心
1990年第5期58-61,共4页
Lubrication Engineering
