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一种电容式加速度传感器的温度补偿电路 被引量:1

Temperature Compensation Circuit of Capacitive Accelerometer
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摘要 在电容式加速度传感器系统中,与电容式加速度敏感头相连的外围电路普遍存在温度漂移的问题。利用差分运算放大电路作为传感器的温度补偿电路,并描述了其工作原理。实验结果表明,该温度补偿电路可有效抑制传感器外围电路的温度漂移,把-40~60℃温度范围内的温漂抑制在20 mV内,且对电容式加速度传感器的线性度也有明显的改善。该补偿电路结构简单、实用性强、调节方便,具有一定的生产应用价值。 In the capacitive accelerometer system,temperature drift of the external circuits connected with the sensitive element of the capacitive accelerometer commonly exists.The differential operational amplifier circuit was used as a sensor temperature compensation circuit,and then its working principle was described.Experimental results show that the temperature compensation circuit can effectively restrict the temperature drift of the external circuit,temperature range of the temperature drift is less than 20 mV,when the temperature was ranging from-40 ℃ to 60 ℃,and linearity of the capacitive accelerometer has a remarkable improvement.The compensation circuit structure is simple,it has strong practicality,convenient adjustment,and a certain value of production application.
出处 《仪表技术与传感器》 CSCD 北大核心 2010年第5期106-107,110,共3页 Instrument Technique and Sensor
基金 国家自然科学基金重点项目(50535030)
关键词 电容式加速度传感器 温度漂移 温度补偿电路 capacitive accelerometer temperature drift temperature compensation circuit
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