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SrTiO_3氧敏元件的制备及机理分析

Preparation of Thick Film SrTiO_3 Oxygen Sensor and the Analysis of Sensing Mechanism
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摘要 利用La、Nb进行施主掺杂,以固相合成法制备了高灵敏度的钛酸锶多晶陶瓷厚膜氧传感器。在600~850℃分别测试样品在大气及N2气氛下的电阻,并对样品的灵敏度和阻温特性进行了分析。研究了烧结温度对样品灵敏度、阻温特性等性能的影响,得出最佳烧结温度应在1 250℃。同时对样品敏感机理进行了深入分析,XRD、SEM的分析表明,制备的样品物相纯净且表面疏松。 High sensitivity SrTiO3 ceramic oxygen sensor was prepared by solid phase synthesis with La and Nb donor-doped.By testing the resistivity of sample in air atmosphere and N2 atmosphere at 600~850 ℃ respectively,the sensitivity and resistivity-temperature characteristic were analyzed.The influence of sintering temperature on sensitivity and resistivity-temperature characteristic was researched,and the best sintering temperature should be 1 250 ℃.The sensing mechanism was analyzed deeply.XRD and SEM analysis showed that the strontium titanate phase was pure and the sample′s surface was loose.
出处 《压电与声光》 CSCD 北大核心 2010年第3期399-401,405,共4页 Piezoelectrics & Acoustooptics
基金 陕西省自然科学基金资助项目(2002F10)
关键词 钛酸锶 施主掺杂 氧传感器 strontium titanate donor-doped oxygen sensor
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