摘要
物镜的分辨率除受入射波长、照明相干度和物镜的数值孔径影响外，很大程度上还受物镜象差的影响本文提出了一种定性分析测量物镜象差和加工装配误差对分辨率的综合影响的新方法，利用该方法对两不同物镜象差影响进行测试和分析并用这两物镜进行了曝光光刻试验。
Resolution of an objective lens is not only affected by the applied wavelength,coherence degree of the light source and the numerical aperture (NA) of the objective lens,but also largely affected by the lens aberration.In this paper,a new method is presented to measure and analyze the overall effects of the lens aberration and manufacturing which will affect the lens resolution.The concept of ‘virtual aberration’ plate is first introduced in calculating the measured results.Two different lens were measured and calculated,and the exposure experiments on photoresist with these lens showed good agreements of the theoretical calculation and measured results.
出处
《光子学报》
EI
CAS
CSCD
1999年第2期165-169,共5页
Acta Photonica Sinica
基金
国家自然科学基金重点资助
