摘要
Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^＋ （A^2П→ X^2П）, CO^＋ （A^2П→X^2∑）, N2^＋ （B^2∑u＋ → X^2∑g^＋）, CO2^＋ （A^2∏ → X^2∏）, N2（C^3∏u → B^3∏g）, O2（b^1∑g^＋→ X^3∑g^-）, and CO （a^r3∑→a^3∏）. The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.
Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^＋ （A^2П→ X^2П）, CO^＋ （A^2П→X^2∑）, N2^＋ （B^2∑u＋ → X^2∑g^＋）, CO2^＋ （A^2∏ → X^2∏）, N2（C^3∏u → B^3∏g）, O2（b^1∑g^＋→ X^3∑g^-）, and CO （a^r3∑→a^3∏）. The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements.
基金
supported by UAEM 2260/06, UAEM 2362/2006U, PROMEP FE018/2003 of Mexico
