摘要
为了实现三维微细电解铣削加工过程的实时监测,建立了基于Labwindows/CVI软件平台的控制与检测系统。对该系统所采用的三维轨迹生成及控制策略,数据采集及抗干扰算法,加工时间误差补偿算法等进行了研究。首先,根据微细电解铣削加工的特点,分析了加工控制与检测系统的需求。接着,搭建了高精度的三维微细铣削加工实验硬件平台。然后,利用虚拟仪器平台建立了基于分层铣削加工方式的三维轨迹进给控制模块,并对刀具轨迹的优化进行了讨论。最后,介绍了数据采集及反馈控制模块以及实时控制的时间补偿函数。基于上述控制与检测系统,实验并成功加工出了单层尺寸为15μm×55μm×15μm的三层阶梯结构,结果表明,本系统可以满足微细电解铣削加工的高精度、快响应、稳定可靠等要求。
In order to realize the real-time control and detection of three-dimensional micro electrochemical milling process,a data acquistion and control system is established based on virtual instrument software Labwindows/CVI.The three-dimensional tool path generation and control strategy,data acquisition and anti-jamming algorithm and the machining time error compensation algorithm for the system are investigated.Firstly,the requirements of the control and detection system are analyzed according to the characteristics of micro electrochemical milling process and a high-precision experimental system for 3D micro electrochemical milling is buit up.Then,the feed control module for three-dimensional tool path is established based on a virtual instrument platform,and the optimization of tool path is discussed.Finally,the data acquisition and its feedback control module and the machining time error compensation function are introduced.On the basis of the system above,a three-step staircase structure with one stair of 15 μm × 55 μm × 15 μm is fabricated successfully.It shows that the system can meet the requirements of micro electrochemical milling for high machining precision,fast response,accuracy control and reliable and stable abilities.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2010年第6期1309-1318,共10页
Optics and Precision Engineering
基金
国家863高技术研究发展计划资助项目(2009AA04Z302)
国家自然科学基金重点项目(No.50635040)
