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底电极与组分对Ba_(1-x)Sr_xTiO_3薄膜结构与介电性能影响的研究 被引量:1

Influence of Bottom Electrode and Constituenton on Structure and Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film
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摘要 以Pt与La0.5Sr0.5CoO3为电极,采用溶胶-凝胶法分别沉积Sr/Ba比不同的Ba1-xSrxTiO3薄膜,研究结果表明:沉积在两种电极上的Ba1-xSrxTiO3薄膜,随着Sr/Ba比的增加,Ba1-xSrxTiO3薄膜的介电常数呈先增大后减小的趋势,当Sr含量为50%即为Ba0.5Sr0.5TiO3且频率为1kHz时,薄膜具有最大的介电常数,分别是80,95和最小的介质损耗,分别是0.15,0.1。介电常数随着频率的升高呈下降趋势,介质损耗则成上升趋势。沉积La0.5Sr0.5CoO3电极上的Ba1-xSrxTiO3薄膜比Pt电极上的Ba1-xSrxTiO3薄膜具有更高的介电常数和低的介质损耗。 Ba1-xSrxTiO3 thin films were depostied on Pt and La0.5Sr0.5CoO3 substrates respectively by sol-gel process,while the Sr/Ba with different values.Results showed that the dielectric constant of Ba1-xSrxTiO3 thin films deposited on different electrode increasing first then decreased along with the increase of Sr/Ba.When Sr/Ba =1,Ba0.5Sr0.5TiO3 had the largest dielectric constant 80,95 and the least loss 0.15,0.1 respectively.With the raise of frequency,dielectric constant of BST showed an downtrend,yet dielectric loss increased.Ba1-xSrxTiO3 thin film on La0.5Sr0.5CoO3 electrode has better dielectric property compared with Pt/Ba1-xSrxTiO3.
出处 《硅酸盐通报》 CAS CSCD 北大核心 2010年第3期612-615,626,共5页 Bulletin of the Chinese Ceramic Society
基金 济南大学博士基金资助项目
关键词 溶胶-凝胶法 Ba1-xSrxTiO3薄膜 电极材料 介电性能 sol-gel process Ba1-xSrxTiO3 thin films electrode material dielectric property
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