期刊文献+

聚酰亚胺基柔性神经微电极的优化

Optimization of Polyimide-Based Flexible Neural Microelectrode
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摘要 对一种聚酰亚胺基柔性神经微电极进行了结构及制作工艺等方面的优化.针对动物视网膜的刺激,设计制作了具有固定通孔结构的柔性神经微电极.在制作工艺方面,使用空气等离子体表面处理以增强金属层的黏附性,降低了微电极的界面阻抗,增强了微电极稳定性,使之适于长期植入.优化后微电极的电极金属层牢固且具有较低的界面阻抗(43kΩ),比处理前降低了25.4%,误差减小了约4/5,具有良好的实用性. The geometry and fabrication of polyimide-based flexible neural microelectrodes were optimized. Aiming at retinal prosthesis,several thru-holes were designed in the flexible neural microelectrode for fixating the electrode during implantation. And a plasma treatment was employed in the fabrication procedure to improve the adhesion of metal layer on the polymer for a long-term implantation. The optimized flexible microelectrode shows stronger adhesion,25.4% lower interface impedance(43 kΩ),and a four fifths reduction of error.
出处 《西安交通大学学报》 EI CAS CSCD 北大核心 2010年第7期85-89,共5页 Journal of Xi'an Jiaotong University
基金 国家重点基础研究发展规划资助项目(2005CB724305) 国家高技术研究发展计划资助项目(2009AA04Z326) 国家自然科学基金资助项目(30872629) 中国科学院上海微系统与信息技术研究所青年创新基金资助项目(2008QNCX02) 上海市自然科学基金资助项目(10ZR1436200)
关键词 柔性微电极 空气等离子体 黏附性 聚酰亚胺 flexible microelectrode air-plasma adhesion polyimide
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