摘要
微机械元件和微机械仪器，适于大批量生产，具有成本低廉、性能优良和体积微小及集成度高的特点，近十年来，研制、开发及市场扩大方面取得了巨大的进展，展现了美好的前景。
MEMS component and instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large scale integration. In this decade a great progress has been made in the research, development and marketing of this field, which suggests a bright future.
出处
《光学精密工程》
EI
CAS
CSCD
1999年第1期10-15,共6页
Optics and Precision Engineering
基金
国家863计划
辽宁省博士启动基金
博士后基金
