摘要
提出一种基于快速傅里叶变换(FFT)提取相位的方法,分析自混合干涉信号,不增加系统复杂度就能将激光自混合(SMLD)微位移测量精度提高到纳米量级。在激光自混合微位移测量原理的基础上,介绍了FFT提取相位信号处理方法的思想,并对反馈光水平、傅里叶变换周期大小、物体运动快慢、物体振动幅度大小4种影响因素进行了仿真分析。从仿真和实验结果可知,该信号处理方法适合低速、小幅度运动物体的测量。应用该方法,选择合适的反馈光水平、傅里叶变换周期,可使激光自混合微位移测量精度达到10nm以内。
Fast Fourier transform （FFT） phase detection method is used to analyze the self-mixing interference signal,without increasing the system′s complexity.By this technique,the self-mixing laser diode （SMLD） micro-displacement measurement technology can obtain nanometre measurement precision.The principle of the self-mixing laser micro-displacement measurement technology is analyzed.The FFT phase detection signal processing is introduced.The optical feeding level,Fourier transform periods length,target moving speed and target vibrating range are analyzed by simulation.Simulation and experimental results show that,this method is suitable to measure target with low speed and small moving range.Choosing proper optical feeding level and Fourier transform periods length,the SMLD micro-displacement sensing technology can obtain measurement precision less than 10 nm.
出处
《激光与光电子学进展》
CSCD
北大核心
2010年第7期96-100,共5页
Laser & Optoelectronics Progress
基金
中国工程物理研究院科学技术发展基金重点课题(2007A05001)
中国工程物理研究院电子工程研究所科技创新基金(S20070202)
总装预研基金(9140A05070208ZW0502)
教育部访问学者基金资助
关键词
微位移测量
快速傅里叶变换
自混合干涉
激光测量
micro-displacement measurement
fast Fourier transform
self-mixing interference
laser measurement
