摘要
采用电子束蒸发混合膜料的方法制备了TiO2/ZrO2复合薄膜,研究了工艺条件(气体流量、沉积速率、基片温度、组份比)对其光学特性的影响。采用椭偏法测量了薄膜的折射率,分析了不同配比复合薄膜的色散特性,得出工艺参数与薄膜光学性能的相互关系,实现了不同折射率的配比。研究结果表明,无论TiO2/ZrO2摩尔比为1:1,1:2还是2:1,其折射率均随沉积温度的升高而增大,但温度升高致使薄膜折射率变化的幅度不大;复合薄膜的折射率随真空度的降低而降低;随着束流从100到160mA增加,复合薄膜的折射率从2.1699到2.2439略微增加;当TiO2/ZrO2比例分别为1:2,1:1和2:1时,薄膜的折射率相应为2.0886,2.1436和2.2584(d光),表明采用工艺优化和蒸镀混合膜料的方法实现折射率的配比仍然是一种行之有效的方法。
The TiO2/ZrO2 composite films were deposited by electron beam vaporization of a mixture of high purity TiO2 and ZrO2 powders on K9 glass substrates.The impacts of the composite films growth conditions,including the gas flow rate,deposition rate,substrate temperature and ratio of TiO2 and ZrO2 powders,on its optical properties were experimentally studied.The results show that the refractive index varies,depending on the molar ratio,substrate temperature and electron beam current.For example,its refractive index slowly increases with an increase of the substrate temperature,but decreases with an increase of the gas pressure.Moreover,as the beam current increases from 100 mA to 160 mA,the index increases from 2.1699 to 2.2439.At the molar ratios of 1：2,1：1 and 2：1,its refractive indexes are 2.0886,2.1436,and 2.2584 （d-line）,respectively.When it comes to the index matching,optimization of the molar ratio outweighs that of other film growth conditions.Possible reasons were tentatively explained.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2010年第4期420-424,共5页
Chinese Journal of Vacuum Science and Technology
基金
陕西省科技工业攻关计划项目(2007K07-17)
陕西省国际科技合作重点项目(2008KW-12)
西安市科技创新支撑计划(YF07051)
关键词
复合膜
折射率
配比
工艺参数
Composite films
Refractive index
Component ratio
Experiment parameter
