摘要
分析了三维表面粗糙度激光三角法测量的基本原理,研究了直射式和对称斜射式三角法测量的光路图和光路几何关系,给出了表面微观高度信息分析的数学模型。从定性和定量2方面对直射式和对称斜射式三角法测量的分辨率进行了分析比较,并分析了激光三角法在三维表面粗糙度测量中的应用。
The basic principle of laser triangulation used for measurement of 3D surface roughness was analyzed,light path diagram and optical geometric relationship of direct type and symmetric oblique type triangulation were studied,and the mathematical model for analyzing micro-height information of surface was offered.Resolution of direct type and symmetric oblique type triangulation were compared qualitatively and quantitatively,and the application of laser triangulation to measurement of 3D surface roughness was analyzed also.
出处
《矿山机械》
北大核心
2010年第14期30-33,共4页
Mining & Processing Equipment
关键词
激光三角法
表面粗糙度
非接触测量
laser triangulation
surface roughness
non-contact measurement