摘要
温度是影响微加速度计精度的一个相当重要的因素。该文首先分析了微加速度计闭环系统各部分的温度特性对系统的影响;接着,设计实验分别测试各个部分的温度特性,确定出敏感元件的温度特性是系统温漂的主要来源;最后,设计了敏感元件芯片自恒温系统,并进行温度补偿。该方案在增加少量加热功率的基础上大大提高了系统的温度特性。实验结果表明:温控后,在增加760 mW加热功率的情况下,能保证微加速度计零偏温漂和二次补偿后零偏稳定性,分别从2.061 mgn/℃和2.269 mgn提高到0.199 mgn/℃和0.129 mgn。
Temperature is one of the most important elements affecting the accuracy of micro accelerometers.A mathematical model of the closed loop system was used to evaluate the effect of the temperature drift introduced by each part in the system.The separate temperature characteristics of each part were then measured to show that the sensor was the main source of temperature drift.A constant temperature chip sensor was then designed,with additional temperature compensation.The system temperature characteristics are significantly improved despite the 760 mW power increase.Tests show that with the constant temperature chip the system zero offset is improved from 2.061 mgn/℃ to 0.199 mgn/℃ and the zero offset stability after temperature compensation is improved from 2.269 mgn to 0.129 mgn.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2010年第7期1013-1017,共5页
Journal of Tsinghua University(Science and Technology)
基金
国家"十一五"预研项目(51308050208)
关键词
梳齿式
微加速度计
芯片自恒温系统
温度补偿
comb-finger
micro accelerometer
constant temperature chip system
temperature compensation
