摘要
采用金刚石线锯对直径65 mm的单晶砷化镓棒材进行切割实验,锯丝线速度分别为0.8,2.5 m.s-1,进给速度分别为0.6,1.5,2.5 mm.min-1.应用原子力显微镜(atomic force microscopy,AFM)测量切割后砷化镓切片的表面粗糙度,根据脆塑转变中的滑移理论分析了金刚石线锯切割砷化镓晶体的加工过程.结果表明:当进给速度为0.6 mm.min-1,线速度为2.5 m.s-1时,切割表面平整,无崩碎现象,表面粗糙度值达55.21 nm.提高线速度,表面粗糙度减小;提高进给速度,表面粗糙度增加.当进给速度较大时,提高线速度,表面粗糙度减小不明显,其主要原因是由于进给速度过高后系统振动、冲击增强所致,而锯丝磨损、磨粒脱落也是切割表面质量降低原因之一.
Using diamond wire saw to cut d=65 mm single-crystal gallium arsenide,the line speed is 0.8 m·s^-1 and 2.5 m·s^-1,the feed rate is 0.6 mm·min^-1,1.5 mm·min^-1 and 2.5 mm·min^-1respectively.AFM（atomic force microscopy） is applied to measure the cut surface roughness.The ductile process of diamond wire saw cutting gallium arsenide crystals is studied according to the theory of brittle materials in ductile regime.The results show that when the feed rate is 0.6 mm·min^-1,line speed is 2.5 m·s^-1,no brittle collapse appears on the cutting surface and the surface roughness value is 55.21 nm.Increasing the line speed the surface roughness is reduced but it is increased with higher feed rate.While the feed rate is large enough,improving the line speed can not lower the surface roughness significantly.This result is inconsistent with the theoretical analysis,the main reason is that when the feed rate is too high it enhances the system vibration and shock,at the same time,saw silk wear and abrasive off is another reason for the disadvantage surface quality.
出处
《扬州大学学报（自然科学版）》
CAS
CSCD
北大核心
2010年第2期33-36,共4页
Journal of Yangzhou University：Natural Science Edition
基金
国家自然科学基金资助项目(50605032)
江苏省精密与微细制造技术重点实验室开放基金资助项目(JSPM200705)
扬州大学科技创新基金资助项目(200809)
关键词
单晶砷化镓
金刚石锯丝
表面质量
线速度
进给速度
single-crystal gallium arsenide
diamond wire saw
surface quality
line speed
feed speed
