摘要
研究开发了一种大行程纳米级共运动平面二维工作台,该工作台采用宏/微两级驱动,宏驱动由滑动导轨、直流无刷电机、精密丝杠组成,微驱动由平行平板柔性铰链和压电陶瓷组成。对平行平板柔性铰链进行了力学分析,并推导计算了其固有频率。工作台移动范围为50mm×50mm,可实现5nm的运动分辨率。工作台在X、Y方向分别装有衍射光栅计量系统,宏微位移由同一套衍射光栅计量系统进行位移计量,计量系统的有效位移分辨率为2.3nm。该二维工作台具有通用化和小型化特点,可以用于微纳米表面的测量与微机电系统的控制与加工。
A coplanar 2D precision stage with large motion range and nanopositioning resolution was developed. The stage is composed of coarse-fine dual-stage actuator,the coarse actuator is composed of a sliding rail,a brushless DC motor and a precision lead screw,and the fine actuator is composed of a parallel board flexure hinge and piezoelectric ceramic. The mechanics analysis and the natural frequency of the parallel board flexure hinge were performed. The displacement range of the stage is 50 mm × 50 mm and 5 nm positioning resolution can be achieved. Two diffraction grating displacement measuring systems are fixed to the stage in X,Y direction respectively,and the displacement of the coarse actuator and the fine actuator is measured by the same diffraction grating displacement measuring system in X or Y direction,which realizes an effective resolution of 2. 3 nm for the measuring system. The XY-stage with characteristics of generality and miniaturization can be applied to the measurement of micro-nano surface topography,control and processing of micro-electro-mechanical systems.
出处
《机械科学与技术》
CSCD
北大核心
2010年第8期981-985,共5页
Mechanical Science and Technology for Aerospace Engineering
基金
国家高技术研究发展计划项目(863计划专项经费)(2008AA042409)
中央高校基本科研业务费专项资金项目(Q2009011)资助
关键词
共平面二维精密工作台
宏/微两级驱动
柔性铰链
光栅位移计量
coplanar 2D precision stage
coarse-fine dual-stage actuator
flexure hinge
grating displacement measuring
