摘要
针对目前我国工业过程自动控制、机电一体化及其他应用领域微压测量用工业变送器、液位计技术的需要，采用较大半径／厚度比（ｒ／ｈ）的新型超薄微压陶瓷弹性体设计和高性能钌酸盐厚膜应变电阻，并运用厚膜印刷、烧结工艺技术，研制出工作温度高、耐腐蚀、性能价格比高的新型厚膜微压力传感器。量程１ｋＰａ、５ｋＰａ、１０ｋＰａ，精度０２％～０５％。并已在石化、冶金、电力等部门推广应用。主要阐述其设计、工艺及主要性能，并对研制中的若干问题进行探讨。
It is introuced in this paper a novel thick film micro pressure sensor based on piezoresistive effect of ruthenate thick film resistors using large r/h ratio and super thin ceramic elastomer.This micro pressure sensor is possessed of advantages such as high operation temperature,corrosion resisting and low cost.It is developed in screen printing and sintering technology.The pressure range is about 1kPa,5kPa,10kPa,and the accuracy is 0 2%～0 5%.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第6期11-14,共4页
Instrument Technique and Sensor
关键词
微压力
压阻效应
厚膜
传感器
研究
Micro Pressure,Piezoreistive Effect,Thick Film,Sensor.
