摘要
介绍了准分子的基本能级结构、光谱特性及产生激光的激励方式。简要回顾了准分子激光及实用准分子器件的发展历史。着重阐述了放电激励准分子器件的相关技术,如大能量与大功率技术、高重复频率技术、光束控制技术和激光电源技术等。分析了准分子激光光刻应用及近期技术发展,介绍了准分子激光在工业、医疗和生产领域的应用。
The fundamental characteristics of excimer are introduced briefly and the historical development of excimer lasers is reviewed.The progress of excimer technology especially for discharge pumped excimer lasers is presented detailedly.The key technologies recently employed to improve the performance of excimer lasers for lithography are analyzed.The applications of discharge pumped excimer lasers in industry,medicine and scientific research are also discussed.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2010年第9期2253-2270,共18页
Chinese Journal of Lasers
基金
国家科技重大专项资助课题
关键词
激光器
准分子激光技术
放电激励
光刻
lasers
excimer lasers technology
discharge pump
lithography
