摘要
对193 nm深紫外激光技术实现途径进行了系统地分析,提出了一种可获得高重复频率、高光束质量的深紫外固体激光技术途径,分析了涉及的关键技术,对实用化深紫外固体激光源的研制具有一定的参考价值。
In this paper,the way of obtaining 193 nm deep ultraviolet laser is analyzed,and a LD pumped solid state laser system by harmonic generations is reported,which has narrow line width,high repetition rate and high beam quality,and is some valuable to make small size and practical 193nm deep ultraviolet solid-state laser.
出处
《激光与红外》
CAS
CSCD
北大核心
2010年第10期1068-1070,共3页
Laser & Infrared
关键词
193nm深紫外激光
谐波转换
固体激光技术
193nm deep ultraviolet laser
harmonic generation
solid state laser technology
