摘要
为了提高多电极静电拉伸薄膜反射镜的面形精度,基于Henky-Campbell圆薄膜平衡方程分析了薄膜均布载荷作用下的拉伸成形和面形误差。采用ANSYS软件一阶优化法,建立了以薄膜屈服强度为状态变量,镜面3个同心环形区域上施加的载荷为设计变量,以反射镜面形与理想面形的最小均方根误差(RMS)为目标的优化模型,对口径300 mm、中心挠度分别为0.5、1.0和1.5 mm的薄膜反射镜面形进行了优化。实验中优化后的最佳镜面面形RMS为7.73μm,PV值为50.69μm,较优化前分别减少了30.2%和23.7%。
In order to improve the surface precision of multi-electrode electrostatic stretching membrane mirrors,the stretching formation and surface shape error of a membrane at uniform load are studied based on the Henky-Campbell equilibrium equations of circular membrane.The first order optimization method of ANSYS software is used to build an optimization model of membrane mirror surface shape,in which the yield strength is the state variable,the surface load on three concentric annular regions of the mirror is the design variable,and the minimum root-mean-square（RMS） between ideal surface and mirror surface is the target function.The surface shapes of membrane mirrors whose center deflections are 0.5 mm,1.0 mm,and 1.5 mm,respectively,are optimized on the three concentric annular electrodes with φ=300 mm.The experimental results show that the RMS error and the peak-valley（PV） value of the optimized surfaces are respectively 7.73 μm and 50.69 μm,which are reduced by 30.2% and 23.7% respectively than those before optimization.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2010年第10期1515-1518,共4页
Journal of Optoelectronics·Laser
基金
国家"863"高技术研究发展计划资助项目(2007AA12Z113)
关键词
静电拉伸
薄膜反射镜
面形精度
面形优化
多电极实验
electrostatic stretching
membrane mirrors
surface shape precision
surface shape optimization
multi-electrode experiment
