摘要
为降低或消除扫描光束光强变化对反射率测试影响,利用光学扫描振镜提供扫描光路.对扫描光路几何关系进行理论推导得出扫描角度与振镜转角及初始入射角的函数关系,利用Matlab对函数进行分析计算,计算结果数据表明:初始入射角不为零时,振镜转角小于10°时扫描角度随振镜转角线性变化,线性度可达到1%且振镜转角越小线性度越好.扫描光束线性度越好光束光强变化越小,对镜面反射率测试的影响越小.
In order to reduce or elimiate the influence of the change in scanning light intensity or the reflectivity test,an optical scanner is applied to provide a scanning light path.A theoretical derivation of the geometrical relation of scanning light path leads to the functional relations of the scanning angle with the deflection angle and the initial incident angle.An analysis of the function by using Matlab shows that,when the initial incident angle does not equal zero and the deflection angle is less then 10°,the variation of the scanning angle with the deflection angle is linear,and the linearity can be up to 1%.The smaller the deflection angle,the better the linearity,and the smaller the change in light intensity,thus reducing the infhrence on the reflecticity test.
出处
《西安工业大学学报》
CAS
2010年第5期421-424,共4页
Journal of Xi’an Technological University
基金
陕西省薄膜技术及光学检测重点实验室开放研究基金项目(ZSKJ200708)
关键词
光学扫描振镜
振镜转角
扫描角度
初始入射角
optical scanner
deflection angle
scanning angular
initial incident angle
