摘要
报道了近年来在ＨｇＣｄＴｅ分子束外延柔性制造技术研究中取得的初步结果，并对面临的任务进行了讨论。研究表明：ＨｇＣｄＴｅ分子束外延薄膜具有很好的组分均匀性、表面形貌、电学参数以及组分可重复性。用分子束外延ＨｇＣｄＴｅ薄膜成功地研制出了３２×３２红外焦平面器件。
The recent preliminary results in developing the MBE technique for HgCdTe are described, and the future challenges are discussed. The results show that the MBE grown HgCdTe exhibits good compositional uniformity, surface morphology, electrical properties as well as compositional reproducibility. A 32×32 focal plane array detector was successfully demonstrated by using MBE HgCdTe.
出处
《高技术通讯》
EI
CAS
CSCD
1999年第3期1-6,共6页
Chinese High Technology Letters
基金
863计划
国家自然科学基金
