摘要
微型热泵是指特征尺寸为"厘米级"的热泵,可用于建筑物、交通工具、衣服或其它装置的供暖或制冷。微电子机械系统(MEMS)的迅速发展,使过程机械装置的微型化和轻量化成为可能,将MEMS技术应用于热泵,其体积和传统装置相比可以缩小到60倍以上。对几种微制造技术进行了比较,并介绍了MEMS技术在微型热泵中的应用。
Micro heat pumps,with dimensions in the order of centimeters,can be utilized for the heating or cooling of buildings,vehicles,clothing,and other products or applications.The development of MEMS makes it possible that the process machinery being miniature and light weight.Compared with the size of traditional machinery,the size of micro heat pump system can reduce 60 times.In this paper,several micro fabrication technologies were compared,and their applications in micro heat pump were described.
出处
《河北理工大学学报（自然科学版）》
CAS
2010年第3期51-55,共5页
Journal of Hebei Polytechnic University:Social Science Edition
基金
唐山市科学技术研究与发展计划项目:09110204a
关键词
MEMS技术
微型热泵
微细加工技术
微型化
technologies
micro heat pump
micro fabrication technology
miniaturization
