摘要
笔者首次利用计算机控制，使动态电磁消像散形成一闭环系统。避开输出的饱和区和截止区。
A close loop system using computer
control to dispel astigmatism dynamically is presented. It prevents the electromagnetic astigmator
from working in saturation and cut off areas and then the eight pole astigmator coils have good
control to dispel astigmatism.
出处
《微细加工技术》
1999年第2期12-16,共5页
Microfabrication Technology
