摘要
采用溶胶-凝胶法制备了用于高功率激光装置的SiO_2减反射膜,并在室温条件下采用气相法对该薄膜进行表面修饰。结果表明:修饰后薄膜的疏水性能、激光损伤阈值均有明显提高;其在大气环境下的耐候性与普通薄膜相当,但对有机污染物的抗性明显提高;经六甲基二硅胺烷修饰、氨气氛及热处理后的薄膜表现出对有机烷类良好的抗污染性能。
The SiO_2 antireflective（AR） coatings for high peak power laser systems were prepared using sol-gel method,and vaporphase treated at room temperature with organosilanes such as hexamethyldisilazane（HMDS） and tnmethylchlorosilane（TMCS）.The results show that the post-treated sol-gel AR coatings are more hydrophobic than standard TEOS-based sol-gel AR coatings and presented an increase in their laser induced damage threshold.The post-treated coatings are as durable as normal SiO_2 AR coatings.But their resistance to contamination by a series of volatile organic compounds is better than those without post-treatment.The coatings treated with ammonia and HMDS after heat treatment show an even better contamination resistant capability to organic alkane.After being contaminated for 70 h with hexane,the transmittance of the coatings decreases only marginally.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2010年第11期2054-2058,共5页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金(11074189,50802064,50752001)
国家科技支撑计划(2009BAC62B02)
国家“863”计划
上海市科委(09520714300,10520706800,0952nm00700)资助项目
关键词
溶胶-凝胶
二氧化硅减反薄膜
表面修饰
抗污染性
硅烷化
sol-gel
silica antireflective coating
surface modification
contamination resistant
silanization
