摘要
非制冷测辐射热计红外焦平面列阵设计为桥式结构，器件制作采用微机械加工技术。工作波段为８～１２μｍ，热阻达１０７Ｋ／Ｗ量级，噪声等效温差为０．１Ｋ。
Uncooled bolometer infrared focal plane arrays with high performance and low cost is designed with bridge structure.The device is fabricated by means of micromachined process technology.The operation wavelength region of 8￣12μm is achieved,with the thermal resistance of 10 7K/W order and the noise equivalent temperature difference of 0 1K.
出处
《半导体技术》
CAS
CSCD
北大核心
1999年第2期5-8,共4页
Semiconductor Technology
关键词
测辐射热计
桥式结构
热阻
红外焦平面列阵
Bolometer Bridge structure Thermal resistance Noise equivalent temperature
