摘要
光波导环形谐振腔是微型光学陀螺的核心敏感部件,其性能直接影响陀螺系统的性能,是此种陀螺设计和制造的关键。利用广角有限差分光束传播法(WA-BPM)对二氧化硅光波导环形谐振腔进行了优化设计;在优化设计的基础上,在硅衬底上利用等离子体增强化学气相沉积(PECVD)法制备了掺GeO2的二氧化硅光波导环形谐振腔芯片,并通过了实验测试,其测量精细度可达16.7,可为今后集成光学陀螺的小型化和高灵敏度提供理论参考。
The waveguide-type optical ring resonator is a core element in micro optic gyro（ MOG）. It influences the performances of gyroscope directly and is the key of the design and manufacturing. This paper optimizes the design of ring resonator composed of GeO2-doped silica waveguides fabricated on silicon substrates by using a wide angle beam propagation method （ WA-BPM）. Based on the design results,the ring resonator is fabricated by using plasma enhanced chemical vapor deposition（ PECVD） method successfully. Observed from the resonance curve,the finesse is 16. 7. It provides a helpful reference for manufacturing of MOG.
出处
《兵工学报》
EI
CAS
CSCD
北大核心
2010年第11期1444-1447,共4页
Acta Armamentarii
基金
总装预研基金项目(51409030205)
关键词
光学
集成光学
环形谐振腔
光波导
微型光学陀螺
optics
integrated optics
ring resonator
silica waveguide
micro optic gyro
