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半导体硅上电沉积Cu/Co层状薄膜 被引量:5

Preparation of Cu/Co Layer Film by Electrodeposition on Semiconductor Silicon
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摘要 The Cu/Co layer film on the sendconductor silicon was obtained by electrodeposition for the first time. The results of current - time transient curves and STM image showed that the wt of Cu film is two-dimensional while an island three-dimension poth for the Co film was formed. The addition of CrO3 changed the current - time transient curves, and affected the growth of crystal. The addition of CrO3 decreased the nucleation rate of Cu, while it changed the shaPe of current-timetransient curves of the deposition of Co at higher deposition potelltials. For the deposition of Co, addition of CrO3 can form the adhesive film [Co. xCr2O3’ YH2O]ad or [CoOH. nCr(OH)3]ad, which decreased the nucleation rate of Co. The Cu/Co layer film on the sendconductor silicon was obtained by electrodeposition for the first time. The results of current - time transient curves and STM image showed that the wt of Cu film is two-dimensional while an island three-dimension poth for the Co film was formed. The addition of CrO3 changed the current - time transient curves, and affected the growth of crystal. The addition of CrO3 decreased the nucleation rate of Cu, while it changed the shaPe of current-timetransient curves of the deposition of Co at higher deposition potelltials. For the deposition of Co, addition of CrO3 can form the adhesive film [Co. xCr2O3' YH2O]ad or [CoOH. nCr(OH)3]ad, which decreased the nucleation rate of Co.
出处 《物理化学学报》 SCIE CAS CSCD 北大核心 1999年第4期356-360,共5页 Acta Physico-Chimica Sinica
基金 国家自然科学基金
关键词 电沉积 层状膜 多层膜 半导体硅 p-Si, Electrodeposition, Cu/Co layer film
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参考文献3

  • 1周绍民.金属电沉积--原理与研究方法[M].上海:上海科学技术出版社,1986.219.
  • 2Gao L J,J Appl Phys,1995年,78卷,9页
  • 3周绍民,金属电沉积.原理与研究方法,1986年,219页

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