摘要
本文采用二维自洽完全流体模型,针对阳极为通孔的高气压微腔放电结构,研究了微腔放电的参数特性.数值计算得到了氩气压强为100Torr,放电稳态时的电势分布、电子数密度分布和电子温度分布等重要参数.模拟结果表明放电区存在显著的阴极鞘层结构,电子数密度的峰值达到1020m-3,电子温度的量级为几个eV至十几eV,该结论与实验结果相一致.数值模拟合理的解释了微腔放电的基本原理.
The two-dimensional numerical model used is based on solutions of fluid equations in the drift-diffusion approximation for the electron and ion transport coupled with Poisson’s equation for electric field to simulate microcavity discharge qualities. The computation results show the potential profile,electron density distribution,ion density distribution,and electron temperature spatial distribution at the argon pressure of 100 Torr. The potential contour shows that the radial component of the electric field becomes very important as the forming of the cathode sheath. The results indicate the peak electron density is 1020m-3,and the electron temperature is on the order of several to tens of eV.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2011年第1期397-402,共6页
Acta Physica Sinica
基金
中央高校基本科研业务费专项资金资助(批准号:3014-893309)
国家建设高水平大学公派研究生项目(批准号:[2006]3074,[2008]3039)
中国博士后科学基金(批准号:20100471633)
辽宁省博士科研启动基金(批准号:20101020)资助的课题~~
关键词
微腔放电
等离子体模拟
流体模型
microcavity discharge（MCD）
plasma simulation
fluid model
