摘要
集成电路功能成品率的研究是集成电路可制造性工程和设计中的重要内容。本文主要对导致成品率下降的缺陷的轮廓模型和集成电路的功能成品率的研究作了简单介绍。
The study on integrated circuits functional yield is important problem of the IC designing and manufacture engineering.The defect model and the yield model are rewiewed with 20 citations.\;
出处
《宝鸡文理学院学报（自然科学版）》
CAS
1999年第3期39-42,共4页
Journal of Baoji University of Arts and Sciences(Natural Science Edition)
