摘要
在物理气相沉积过程中,触发真空间隙是整个试验过程中最基本的一步,很多因素影响真空间隙的成功触发,本文对此加以讨论,并提供一个合适的触发电路.
It is essential to trigger the vacuum gap in the process of physical vacuum Deposition (PVD). According to practical experience, there are several factors influencing successful ignition. The paper presents a successful triggering circuit with necessary discussion.
出处
《江苏机械制造与自动化》
1999年第4期37-38,28,共3页
Jiangsu Machine Building & Automation
