摘要
着重从实验角度对飞秒激光烧蚀金属薄膜所得直线微槽的形状尺寸与实验加工参数之间的控制规律进行了研究。对使用频率为1 kHz、波长为800 nm、脉宽为30 fs的超短脉冲激光在150 nm厚的金铬薄膜上直线扫描所得微结构进行观察,发现:改变聚焦物镜的数值孔径(NA)、激光功率、扫描速率以及重复扫描次数等实验参数,均会对加工所得微槽宽度造成影响。得到了减小聚焦物镜数值孔径、提高激光功率、降低激光扫描速率、增加扫描次数均能提高直线微槽的宽度的参数控制规律。此外,还对后向激光烧蚀方法进行了实验研究,并与前向刻蚀的实验结果进行比较,验证了前向加工方法在加工质量和加工效率方面均优于后向加工,并分析其原因。
The relationship between the width of the linear microgrooves fabricated on the surface of metal film using a focused femtosecond laser and experiment parameters were explored through experiments. The microgrooves was in the gold-chromium film with a thickness of 150 nm coated on the glass-substrate and ablated by the laser which had wavelength of 800 nm with pulse duration (width) of 30 fs and pulse repetition rate of 1 kHz. The analysis of experimental results shows that changing the values of NA, the laser power, the scan speed and scan times will affect the width of microgrooves. It can be concluded that the width of linear microgrooves can be improved by decreasing the NA, increasing the laser power, slowing the scan speed or increasing the scan times. Furthermore, the rear-side laser ablation were confirmed through tests and compared with the results of front-side laser ablation. The results indicate that the front-side method is a more promising micromachining technique than the rear-side method on the aspects of machining quality and efficiency, and the reasons were analyzed.
出处
《红外与激光工程》
EI
CSCD
北大核心
2011年第1期61-65,共5页
Infrared and Laser Engineering
基金
国家自然科学基金资助项目(50905138)
国家科技部"973"项目(2007CB707703)
中国博士后基金资助项目(20090451380)
西安交通大学校内基金资助项目
关键词
飞秒激光
金铬薄膜
微槽线宽
前向烧蚀
后向烧蚀
femtosecond laser
gold-chromium film
width of linear microgrooves
front-side laser ablation
rear-side laser ablation