摘要
直流辉光放电过程中需要控制的三个重要工作参数为放电电流、放电电压和放电室内氩气气压。该文介绍了一种应用于直流辉光放电等离子体激发光源的自动调节控制系统,该控制系统在放电电流恒定的情况下调节放电室内氩气气压,实现了对放电电压的信号采集和自动控制。文章阐述了该控制系统的设计思路、电路原理及控制方案。该自动调节控制系统改善了以往用手动调节时精度低且操作复杂的情况,提高了放电电压的控制精度,缩短了放电电压的稳定时间。文中给出了自动控制方式下激发源放电电压的稳定性测试结果,控制精度由手动调节时的4%FS改善为小于1%FS,放电电压稳定时间由手动时的大于90s缩短到30s以内。采用该控制系统对中低合金钢和锡青铜标准样品进行了样品精密度实验。元素含量分析精密度比手动调节方式显著提高,各元素含量测试结果的相对标准偏差(RSD)均优于3.5%。中低合金钢标准样品中Ti,Co,Mn元素含量测试结果的RSD范围由手动时的3.0%～4.3%减小到1.7%～2.4%,S和Mo元素RSD范围由5.2%～5.9%减小到3.3%～3.5%。锡青铜标准样品中Sn,Zn,Al元素RSD范围由2.6%～4.4%减小到1.0%～2.4%,Si,Ni,Fe元素的RSD范围由6.6%～13.9%降低到2.6%～3.5%,并给出了实测数据。
There are three important parameters in the DC glow discharge process,the discharge current,discharge voltage and argon pressure in discharge source.These parameters influence each other during glow discharge process.This paper presents an automatic control system for DC glow discharge plasma source.This system collects and controls discharge voltage automatically by adjusting discharge source pressure while the discharge current is constant in the glow discharge process.The design concept,circuit principle and control program of this automatic control system are described.The accuracy is improved by this automatic control system with the method of reducing the complex operations and manual control errors.This system enhances the control accuracy of glow discharge voltage,and reduces the time to reach discharge voltage stability.The glow discharge voltage stability test results with automatic control system are provided as well,the accuracy with automatic control system is better than 1% FS which is improved from 4%FS by manual control.Time to reach discharge voltage stability has been shortened to within 30 s by automatic control from more than 90 s by manual control.Standard samples like middle-low alloy steel and tin bronze have been tested by this automatic control system.The concentration analysis precision has been significantly improved.The RSDs of all the test result are better than 3.5%.In middle-low alloy steel standard sample,the RSD range of concentration test result of Ti,Co and Mn elements is reduced from 3.0%～4.3% by manual control to 1.7%～2.4% by automatic control,and that for S and Mo is also reduced from 5.2%～5.9% to 3.3%～3.5%.In tin bronze standard sample,the RSD range of Sn,Zn and Al elements is reduced from 2.6%～4.4% to 1.0%～2.4%,and that for Si,Ni and Fe is reduced from 6.6%～13.9% to 2.6%～3.5%.The test data is also shown in this paper.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
2011年第3期839-843,共5页
Spectroscopy and Spectral Analysis
基金
国家科技部科学仪器设备升级改造专项项目(JG-2002-9)资助
关键词
辉光放电
等离子体
溅射
自动控制
比例电磁阀
Glow discharge
Plasma
Sputter
Automatic control
Proportional solenoid valve
