摘要
为了研究工艺参数对泡生法蓝宝石晶体生长过程及其晶体质量的影响,在自行研制的泡生法蓝宝石晶体生长炉上进行了试验.调整籽晶热交换器水流量及进水温度,并在等径生长期间采用不同的维持功率下降速度,结果表明:热交换器冷却强度对引晶及放肩阶段晶体生长有显著影响,并逐步减弱;维持功率下降速度直接影响等径生长阶段的晶体生长速度和晶体质量,下降太快将导致晶体缺陷密度增加,严重时形成多晶.在晶体生长过程中,合理调节籽晶热交换器的冷却强度,谨慎操控维持功率下降速度是蓝宝石单晶生长成败的关键.
For studying the effects of technological parameters on sapphire crystal growth and quality of the sapphire, several modifications of technological parameters were made on self-developed Kyropoulos furnace during crystallization, including the adjustment of flow rate and temperature of cooling water in thermal exchanger, and the descending rate of maintain power. It was found that the cooling intensity of thermal exchanger influences the crystal growth obviously in the stage of seeding and shoulder-expanding and the influence weakens gradually, while the descending rate of maintain power during the stage of iso-diametric growth has a great effect on the crystallization rate and the quality of the sapphire. Too fast decreasing of maintain power will cause the failure of mono-crystal growth, so that the proper adjustment of cooling intensity of thermal exchanger and the careful eontrol of maintain power during crystal growth are the two important factors for successfully producing sapphire mono-crystal.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2011年第3期145-148,共4页
Journal of Harbin Institute of Technology
关键词
泡生法
蓝宝石单晶
水冷热交换器
维持功率
Kyropoulos method
sapphire mono-crystal
water cooled thermal exchanger
maintain power
