摘要
阐述了三氯氢硅主要工艺过程。
The production technologies of trichlorosilane were briefly reviewed, the existing problems and olutions were pointed out.
出处
《中国氯碱》
CAS
2011年第3期32-34,共3页
China Chlor-Alkali
关键词
三氯氢硅
四氯化硅
多晶硅
尾气
trichlorosilane
silicon tetrachloride
polycrystalline silicon
exhaust gas
