摘要
提出一种不用标样确定基体薄涂层厚度并同时得到薄膜成分的新方法.通过理论计算,得出在不同涂层厚度下,涂层与基体的特征X射线相对强度比I_c/I_s并作出理论曲线;然后用能谱技术测出I_c/I_s,可由理论曲线得出相应的涂层厚度.经实验证明该方法可行.
We give a new standardless method for thickness determination of thin coating on substrate in this paper: by means of direct calculation of characteristic X-ray intensities from the thin coating and the sub-strate, a set of relative ratios of IC/I_s are obtained for a given set of coating thickness, and theoretical curve is made. Then the same kind of coating which has unknown thickness could be determined by measuring I_c/I_s using EDS. It was proved by comparison between the curve that proposed method is suitable. The advantage of this method is not using coating and substrate standards, while retaining the advantage of high spatial resolution char-acteristics of SEM and getting the compositions of the thin coating at same time.
出处
《理化检验（物理分册）》
CAS
1999年第7期310-313,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
