摘要
本文简要总结了近年来超硬膜研究领域中的一些最新进展，包括超硬膜硬度的理论研究和轻元素组成的超硬膜、纳米复合膜、纳米多层膜以及它们力学性能增强效应的理论解释．对超硬膜以后的发展趋势提出了自己的一些见解．
The current achievements in superhard thin films were reviewed. Theoretical research on thehardness of superhard films was surveyed, followed by the discussion on the strengthening mechanisms in different superhard films such as those combined with light elements, nano-compositefilms and nano-multilayers. The perspective on the development of superhard films was also given.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第5期705-710,共6页
Journal of Inorganic Materials
基金
国家自然科学基金!59782006
国家攀登计划!07-01
中科院上海硅酸盐研究所所长择优基金!5297-4
