摘要
分析了阵列悬臂探针并行扫描的工作方式,以非接触磁力模拟样品与悬臂梁间的范德华力,研究了1×2阵列压电悬臂梁的并行扫描和驱动控制方法。每一压电梁均集成了微位移致动器和力传感器,在320Hz一阶共振频率下振动。实验表明:在0.2～1.0mm力作用区内,压电梁自由端每接近模拟样品0.1mm,表征悬臂梁振幅的锁相放大器输出电压减小1.7mV,但微力传感在扫描的升回程存在迟滞;致动器的控制电压每增加10V使锁相放大器输出减小约3mV,表明集成的致动器可调节压电梁与样品间的间距。两压电梁的电荷-位移响应曲线、间距调节灵敏度均不完全一致,讨论了阵列悬臂梁一致性问题和阵列规模大小问题。
The operation way of the parallel scanning using array cantilevers in AFM was analyzed.The non-contact magnetic force was used to imitate van der Waals forces between the sample and the cantilever,and the 1×2 array piezoelectric bimorph was taken for example to investigate the parallel scanning and the drive control method.Each piezoelectric bimorph was integra-ted with both the micrometric displacement actuator and force sensor,and the array bimorph were excited by a vibration exciter at the first resonance of 320 Hz.The charge response to the magnetic force was detected by the charge amplifier and lock-in amplifier.The experimental results show that the lock-in amplifier output decreases 1.7 mV as the bimorph approaches each 0.1 mm to the sample in 0.2-1.0 mm force function range,however the force sensor shows the hysteresis in a round trip.The lock-in amplifier output reduces about 3 mV for every 10 V increase in the actuation voltage,which indicates that the distance between the sample and the cantilever can be independently adjusted by each bimorph.It is not ideal that the sensitivity of the charge displacement response curves and the distance adjustment for the two bimorph are diffe-rent.Thus,the problems of the inconsistence and array quantity were discussed.
出处
《微纳电子技术》
CAS
北大核心
2011年第4期264-268,273,共6页
Micronanoelectronic Technology
