摘要
由于硅微型加速度计高动态性能和特殊的制造工艺，在设计阶段必须对其进行详细的结构动态分析．本文建立了微加速度计三维有限元模型，分析计算了其基本模态，研究了其瞬态响应和响应谱等动态特性．
Micro silicon accelerometer should be dynamically analyzed and simulated early in the design phase due to the high requirement of dynamic performance and special micro fabrication techniques. A 3D finite_element model of micro silicon accelerometer is built and mode_frequency is computed. Further more, dynamic character such as transient response and spectrum is researched.
出处
《东南大学学报（自然科学版）》
EI
CAS
CSCD
1999年第5期81-85,共5页
Journal of Southeast University：Natural Science Edition
基金
国防科技预研基金
