摘要
介绍昊华宇航化工有限责任公司向三氯氢硅合成工序输送氯化氢过程中存在的问题,提出了改进措施。
Problems existing in conveying hydrogen chloride to synthesis procedure of trichlorosilane in Haohua Yuhang Chemical Industry Co. , Ltd. were introduced. Improvement measures were put forward.
出处
《氯碱工业》
CAS
2011年第4期26-28,共3页
Chlor-Alkali Industry
关键词
三氯氢硅
氯化氢
输送工艺
trichlorosilane
hydrogen chloride
conveyance process
