摘要
The variable-included angle plane-grating monochromator is a homemade key equipment of the scanning transmission X-ray microscopy (STXM) beamline at Shanghai Synchrotron Radiation Facility (SSRF).Monochromatic light of various wavelengths is achieved by an effective control system that handles the rotation of the plane mirror and plane grating mounted in a high vacuum chamber.M511.DDB made by PI Corp.is used as motion stage which has a DC servo motor controlled by a C862 controller based on RS232 protocol.The software platform of STXM is EPICS,so the local control functions are implemented by LabVIEW program to satisfy physics control.For the remote control functions,the program is integrated into EPICS with ShareMemoryIOC.Experimental tests show that the repeat precision of motion control is less than 0.2μm,which meets the control demand.
The variable-included angle plane-grating monochromator is a homemade key equipment of the scanning transmission X-ray microscopy （STXM） beamline at Shanghai Synchrotron Radiation Facility （SSRF）.Monochromatic light of various wavelengths is achieved by an effective control system that handles the rotation of the plane mirror and plane grating mounted in a high vacuum chamber.M511.DDB made by PI Corp.is used as motion stage which has a DC servo motor controlled by a C862 controller based on RS232 protocol.The software platform of STXM is EPICS,so the local control functions are implemented by LabVIEW program to satisfy physics control.For the remote control functions,the program is integrated into EPICS with ShareMemoryIOC.Experimental tests show that the repeat precision of motion control is less than 0.2μm,which meets the control demand.
基金
Supported by Shanghai Synchrotron Radiation Facility project
