摘要
利用傅立叶变换红外光谱法对微量一氧化氮、二氧化氮、氧化亚氮、氨气、氯化氢、二氧化硫、二氯氢硅、三氯氢硅、四氯化硅等使用常规方法分析难度大、灵敏度不足、操作复杂的气体样品进行了定量分析。在恒定实验条件下进样,分辨率为4 cm-1,扫描8次,可以得到理想的分析结果。以氨气、一氧化氮和二氧化氮为例的定量分析结果表明,该方法重复性良好(相对标准偏差<1%),在所测浓度范围内线性良好(R2>0.999),扩展不确定度小(<4%),可用于某些具有红外吸收气体物质的定量分析,为这些难定量物质的准确定量提供了可靠的方法。
Trace amount of special gases including NO,NO2,N2O,NH3,HCl,SO2,H2SiCl2,HSiCl3 and SiCl4 were determined quantitatively using FT-IR method.Satisfying results were obtained with a resolution of 4 cm-1 and 8 scans.The quantitative results of the gases such as NH3,NO and NO2 demonstrated that FT-IR method had excellent repeatability（RSD 1%）,linearity（R2 0.999）,and low expanded uncertainty（ 4%）.This method provided opportunities for the determination of IR active gases,which have difficulties in quantification with other methods.
出处
《低温与特气》
CAS
2011年第2期35-39,共5页
Low Temperature and Specialty Gases
关键词
FT-IR
微量
氮氧化物
氨
氯化氢
氯硅烷
FT-IR
trace
nitrogen oxides
ammonia
hydrogen chloride
chlorosilane
