摘要
介绍了国家自然科学基金重点资助项目“微型机械制造基础理论及基础技术研究”中“微小型泵的基础技术”及其后续工作的研究成果，并结合微流量系统研究分析了当前微型机电系统发展的几个特点。微型机电系统的重要基础课题的研究突破为其发展和应用打下基础。国际上微型光机电系统技术刚走向全面发展，正是我国发展该领域的好时机。
The research results of “the fundamental technologies of micropumps”, being part of the key project of “the fundamental research on the theories and technologies of micro manufacturing” supported by the National Nature Science Foundation of China, are summarized and the continued research work is also introduced in this paper. And the characteristics of microelectromechanical systems are described based on the research activities of the micro fluidic systems. Microelectromechanical systems will open up more and more applications with the breakthrough progress in the key fundamental researches. It is a chance for us to develop the field of MEMS while MEMS are just being promoted roundly in the world.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
1999年第9期991-993,共3页
China Mechanical Engineering
基金
国家自然科学基金
关键词
微型机电系统
微流量系统
微型泵
尺寸效应
microelectromechanical systems(MEMS) micro fluidic systems micropump scaling
