摘要
本研究首次报导了利用喷雾热分解法成功地制备出ＺｎＯ 低压压敏薄膜。沉积温度３５０ ℃，沉积时间２ｈ ，退火温度６５０ ℃，ＸＲＤ 谱表明薄膜已良好晶化且薄膜的生长具有取向性。所制备的薄膜的非线性系数 α可在７ ．９９ ～２２ ．３８ 之间变化。压敏电压Ｖ１ｍＡ可在１３ ．５８ ～２５ ．３１ 之间任意变化；实验证明薄膜的厚度是决定压敏电压和非线性系数大小的重要因素之一。
This paper reports ZnO low voltage thin film varistor prepared by spray pyrolysis for the first time.The depositing temperature is 350℃;depositing time is 2h;annealing temperature is 650℃.XRD patterns shows that the thin film is well crystallized and crystal growth is oriented.The thin film's nonlinear coefficient varies from 7.99 to 22.38 and it's nonlinear voltage (V 1mA ) from 13.58 to 25.31. Experimental result shows that the thin film's thickness is one of the most important factors in determining ZnO thin film's nonlinear voltage (V 1mA ) and its nonliear coefficient (α ).
出处
《功能材料》
EI
CAS
CSCD
北大核心
1999年第6期636-638,共3页
Journal of Functional Materials
关键词
氧化锌
低压压敏薄膜
喷雾热分解
压敏电压
zinc oxide
low voltage thin film varistor
spray pyrolysis
nonlinear voltage (V 1mA )
nonlinear coefficient(α)
