摘要
介绍了阴极真空弧沉积中，弧源在阴极接地和阳极接地2种不同工作状态下的工作特性．发现阳极接地时，因沉积靶室入口法兰的第二阳极作用，聚焦磁场对孤源放电稳定性的影响不如阴极接地时明显．因此可以加较高的聚焦磁场，从而获得电流较大和较稳定的沉积离子束．
Investigations about the MEVVA plasma source performance in cathodic vacuumare deposition are presented. Becarse of the second anode action of the grounded-chamber,the influence of the focus magnetic field to the stability of the arc discharge is weakened with ground-anode than that with grounded-cathode. Therefore, higher ion intensity and more stable working state are observed with grounded-anode.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
1999年第3期366-369,共4页
Journal of Beijing Normal University(Natural Science)
基金
国家"八六三"计划资助!863-715-008-0040
国家教育部射线束材料工程实验室资助
