摘要
研究了成象X射线光电子能谱(XPS)定量分析的可能性,提出了成象XPS定量分析模型,讨论了它的适用范围和局限性。
The possibility of quantitative analysis by XPS imaging is studied.The principle and mathematical model of quatitative XPS imaging are presented. The application and limitation of the method are discussed.
出处
《分析仪器》
CAS
1999年第4期12-14,共3页
Analytical Instrumentation
基金
国家自然科学基金!(No29675029)